Our Product
Al₂O₃ ceramic ESC
Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.
Category:
Product description
Temperature: ambient temperature version (non-heating, with a chiller)
Features and applications: Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.
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