Our Product
Al₂O₃ ceramic ESC (customized)
Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
zone-based temperature control, a good solution for Etch, PVD, CVD, and similar process equipment requiring temperature-controlled bases.
temperature-controlled version (non-heating, with a chiller)
Features and applications:
zone-based temperature control, a good solution for Etch, PVD, CVD, and similar process equipment requiring temperature-controlled bases.
Category:
Product description
Dimensions: 12”
Voltage:±3.6KV
Voltage:＞10gf/c㎡
Temperature: temperature-controlled version (non-heating, with a chiller)
Features and applications:zone-based temperature control, a good solution for Etch, PVD, CVD, and similar process equipment requiring temperature-controlled bases.
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501-1, Block A, 530 Chuangye Building, No. 18 Qingyuan Road, Xinwu District, Wuxi City, Jiangsu Province
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