Al₂O₃ ceramic ESC (customized)-Wuxi E-chuck Co., Ltd.

简体中文

Our Product

Home

Al₂O₃ ceramic ESC (customized)

Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, with excellent thermal conductivity, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Category:

Product Development and Applications

Service Hotline:

+86-13093119099

Inquiry

Product description

Dimensions:8”
Voltage:±6KV
Voltage:＞10gf/c㎡
Temperature: ambient temperature version (non-heating, with a chiller)
Features and applications: Coulomb type, dual voltage level, etch-resistant, with excellent thermal conductivity, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.