Our Product
Al₂O₃ ceramic ESC
Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.
Category:
Product description
Dimensions:8”
Voltage:±2000V
Adhesion: ＞10gf/c㎡
Temperature: ambient temperature version (non-heating, with a chiller)
Features and applications:Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.
无锡宜恰
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501-1, Block A, 530 Chuangye Building, No. 18 Qingyuan Road, Xinwu District, Wuxi City, Jiangsu Province
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