Al₂O₃-doped ESC-Wuxi E-chuck Co., Ltd.

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Al₂O₃-doped ESC

Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
JR type, zone-based temperature control, 8” to replace 12” ones, a good solution for Etch, CVD, and similar process equipment requiring temperature compensation.

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+86-13093119099

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Product description

Dimensions:8”
Voltage: ±1000V
Voltage: ＞10gf/c㎡
Temperature: temperature-controlled version (non-heating, with a chiller)
Features and applications: JR type, zone-based temperature control, 8” to replace 12” ones, a good solution for Etch, CVD, and similar process equipment requiring temperature compensation.