Our Product
High-temperature Al₂O₃ ceramic ESC
Temperature:
high temperature version (-30–600℃)
Features and applications:
Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.
high temperature version (-30–600℃)
Features and applications:
Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.
Category:
Product description
Temperature:high temperature version (-30–600℃)
Features and applications:Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.
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