Al₂O₃ ceramic ESC

Al₂O₃ ceramic ESC

<strong>Temperature: </strong><br> ambient temperature version (non-heating, with a chiller) <br> <strong>Features and applications: </strong><br> Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Al₂O₃ ceramic ESC

<strong>Temperature: </strong><br> ambient temperature version (non-heating, with a chiller) <br> <strong>Features and applications: </strong><br> Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Al₂O₃ ceramic ESC

<strong>Temperature: </strong><br> ambient temperature version (non-heating, with a chiller) <br> <strong>Features and applications: </strong><br> Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Al₂O₃ ceramic ESC

<strong>Temperature: </strong><br> ambient temperature version (non-heating, with a chiller, dual waterways) <br> <strong>Features and applications: </strong><br> Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.