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AlN ceramic ESC (OEM improved)
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AlN ceramic ESC (OEM improved)
<strong>Temperature: </strong><br> ambient temperature version (non-heating, with a chiller) <br> <strong>Features and applications:</strong><br> Coulomb type, dual voltage level, etch-resistant, with excellent thermal conductivity, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.
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