High-temperature Al₂O₃ ceramic ESC

High-temperature Al₂O₃ ceramic ESC

<strong>Temperature:</strong><br> high temperature version (-30–600℃) <br> <strong>Features and applications:</strong><br> Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.

High-temperature Al₂O₃ ceramic ESC

<strong>Temperature:</strong><br> high temperature version (-30–600℃) <br> <strong>Features and applications:</strong><br> Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.