E-chuck

To be a top solution provider of advanced semiconductor components in China

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E-chuck

To be a top solution provider of advanced semiconductor components in China

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Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller, dual waterways)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, single voltage level, etch-resistant, long service life, a good solution for Etch, TSV, TGV processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

High-temperature Al₂O₃ ceramic ESC


Temperature:
high temperature version (-30–600℃)
Features and applications:
Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

High-temperature Al₂O₃ ceramic ESC


Temperature:
high temperature version (-30–600℃)
Features and applications:
Coulomb type, dual voltage level, high temperature-resistant, a good solution for PVD, IMP processes, and other high-temperature process equipment.

Our Product Development and Applications

AlN ceramic ESC (OEM improved)


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, with excellent thermal conductivity, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC (customized)


Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
zone-based temperature control, a good solution for Etch, PVD, CVD, and similar process equipment requiring temperature-controlled bases.

Our Product Development and Applications

Al₂O₃ ceramic ESC (customized)


Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
zone-based temperature control, a good solution for Etch, PVD, CVD, and similar process equipment requiring temperature-controlled bases.

Our Product Development and Applications

Al₂O₃ ceramic ESC (customized)


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, with excellent thermal conductivity, a good solution for Etch, PVD, CVD processes, and other conventional process equipment.

Our Product Development and Applications

Al₂O₃-doped ESC


Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
JR type, high adhesion force, with excellent thermal conductivity, low wafer surface temperature rise, a good solution for 8–12” Etch, PVD, and CVD processes.

Our Product Development and Applications

Al₂O₃-doped ESC


Temperature:
temperature-controlled version (non-heating, with a chiller)
Features and applications:
JR type, zone-based temperature control, 8” to replace 12” ones, a good solution for Etch, CVD, and similar process equipment requiring temperature compensation.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.

Our Product Development and Applications

Al₂O₃ ceramic ESC


Temperature:
ambient temperature version (non-heating, with a chiller)
Features and applications:
Coulomb type, dual voltage level, etch-resistant, long service life, a good solution for Etch (including SV) and other common process equipment.
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
High-temperature Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
High-temperature Al₂O₃ ceramic ESC
AlN ceramic ESC (OEM improved)
Al₂O₃ ceramic ESC (customized)
Al₂O₃ ceramic ESC (customized)
Al₂O₃ ceramic ESC (customized)
Al₂O₃-doped ESC
Al₂O₃-doped ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC
Al₂O₃ ceramic ESC

Our Core Technologies

Electrostatic chucks are critical components of semiconductor equipment as they directly influence the equipment’s processing performance, online operational efficiency, and percent of pass of wafers. 

Our Design Technologies

Electrostatic field simulation technology
Adhesion simulation technology
Thermal field simulation technology

Our Manufacturing Technologies

Ceramic sintering technology
Electrode preparation technology
Ceramic coating technology

Our Detection Technologies

Material dimensional accuracy: dimensional
Material defects: cracks, resistivity, thermal
Electrical performance: dielectric strength

Technologies

ETCH
PVD
IMP

Wuxi E-chuck Co., Ltd.


Wuxi E-chuck Co., Ltd. based in Wuxi City, Jiangsu Province, specializes in the R&D, production, and sales of core semiconductor components. We also supply semiconductor materials and technical support for semiconductor equipment components. We have persistently focused on technical excellence, underpinned by our commitment to integrity and quality. With high client satisfaction as our guiding principle, we are dedicated to meeting client needs by making continuous product innovation. Our clientele includes semiconductor firms, academic institutions, and research facilities among others. 

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Cooperative Partner

With our proactive and enthusiastic services, cost-effective products, and responsive and effective after-sales support, we have garnered widespread support and trust from numerous clients.

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News Center

To be a top solution provider of advanced semiconductor components in China 


2022

07-28

Annual output of 3000 tons of alumina ceramics project to help ceramic industry innovation and development

Recently, the annual output of 3,000 tons of alumina special ceramic composite materials industrialization project in Yaozhou kiln culture base industrial ceramics industrial park formally put into production, marking China's ceramics industry in the road of innovation and development has taken an important step. The project is led by Shaanxi Aohua Porcelain Technology Co., Ltd, with a total investment of 40 million yuan, aims to enhance the performance and yield of ceramic products through the use of intelligent, green equipment, to meet the aerospace, high-speed rail, new energy vehicles and other fields of high-performance ceramic materials needs.

2022

07-28

Annual output of 3000 tons of alumina ceramics project to help ceramic industry innovation and development

Recently, the annual output of 3,000 tons of alumina special ceramic composite materials industrialization project in Yaozhou kiln culture base industrial ceramics industrial park formally put into production, marking China's ceramics industry in the road of innovation and development has taken an important step. The project is led by Shaanxi Aohua Porcelain Technology Co., Ltd, with a total investment of 40 million yuan, aims to enhance the performance and yield of ceramic products through the use of intelligent, green equipment, to meet the aerospace, high-speed rail, new energy vehicles and other fields of high-performance ceramic materials needs.

2022

01-10

Alumina Ceramics: Leading the New Era of Material Science and Technology with Excellent Performance

Recently, alumina ceramics have attracted widespread attention due to their excellent physical and chemical properties, showing strong application potential and market value in a variety of fields. As a high-performance ceramic material, alumina ceramics with its unique advantages, is gradually becoming an indispensable key material for modern industry.

2021

11-12

Alumina ceramics: Innovative materials for multiple applications lead the way to the future

In today's era of rapid technological development, alumina ceramics, as a high-performance material, is with its unique physical and chemical properties, in a number of fields to show a wide range of application potential and huge market value. Recently, the successful application of alumina ceramics in aerospace, electronics, medical, chemical and other industries, has attracted widespread attention in the industry.

2021

11-12

Revolutionary Electrostatic Chuck Technology Unveiled, Revolutionizing Semiconductor Manufacturing

A groundbreaking advancement in semiconductor manufacturing has been announced today, as XYZ Corporation, a leading provider of precision automation solutions, unveiled its latest innovation: the Advanced Electrostatic Chuck (AEC) system. This revolutionary technology is poised to revolutionize the industry by enhancing wafer handling efficiency, improving yield rates, and reducing downtime during critical manufacturing processes.

2021

11-12

Electrostatic Chuck Market Expands Rapidly, Fueled by Demand for Advanced Semiconductor Devices

The global electrostatic chuck market is experiencing unprecedented growth, fueled by the soaring demand for advanced semiconductor devices across various industries, including consumer electronics, automotive, healthcare, and data centers. According to a recent market report by Market Insights International, the market is projected to expand at a CAGR of over 15% during the next five years, reaching a valuation of $X billion by 2027.